CVD Furnace(C)

Description

Furnace for Anti-Oxidation Coating and Material Modification
This furnace utilizes Silicohydride gas for processes such as anti-oxidation coating and material property alteration. It is available in both horizontal and vertical configurations.

Applications:

SiC coating for C/C composite materials

SiC coating for graphite

SiC, BN, and ZrC coatings for fibers and more

Technical Details

Description
ModelSMC-HTE-060609-SiCSMC-HTE-101015-SiCSMC-HTE-121220-SiC
Working Zone Size (W × H × L) (mm)600 × 600 × 9001000 × 1000 × 15001200×1200×2000
Max. Temperature (°C)150015001500
Temperature Uniformity (°C)±7.5±7.5±10
Ultimate Vacuum (Pa)1-1001-1001-100
Pressure Increase Rate (Pa/h)0.670.670.67